Versatile system for a locking electro-thermal actuated MEMS switch
AssigneeSamsung Electronics Co., Ltd.
InventorsXu Zhu, Michael Brobston
Life of this patent
Estimating the term…
Abstract
A lockable MEMS switching architecture provided having a clutch assembly, a switching member, and an actuator. The clutch assembly has one or more engagement features located in proximity to the switching member - particularly one or more receiving features located upon the switching member. The clutch assembly is actuated to disengage the engagement features from the receiving features. The switching member is actuated to move in relation to the clutch assembly. Once the switching member is in a desired position, the clutch assembly is de-actuated, causing the engagement features to re-engage with the switching member, thereby restricting its further movement.
Claims20
A micro-electromechanical system (MEMS) device comprising:
- a switching member;
- a first actuator coupled to a first portion of the switching member;
- a switching element coupled to a second portion of the switching member, opposite the first actuator;
- an engagement feature, disposed along the switching member between the first actuator and the switching element;
- a first contact element, disposed along a surface of the switching element;
- a clutch assembly, having an engagement element formed in proximity to, and adapted to operably engage with, the engagement feature;
- and
- a second contact element, formed in proximity to the first contact element and adapted to form contact therewith when the switching member is actuated or when the switching member is not actuated.
A method of lockably switching a MEMS switch device, comprising the steps of:
- providing a switching member having a plurality of engagement features disposed along a surface thereof;
- providing a first actuator coupled to a first portion of the switching member;
- providing a clutch assembly, having an engagement element formed in proximity to, and adapted to operably engage with, the engagement features, and having a second actuator adapted to engage or disengage the engagement element from the engagement features;
- actuating the second actuator to disengage the engagement element from a first engagement feature;
- actuating the first actuator to move the switching element relative to the engagement element;
- and
- de-actuating the second actuator to engage the engagement element with a second engagement feature.
A wireless communications device comprising:
- an antenna input;
- a plurality of antenna or transceiver structures;
- a switching member adapted to selectively couple the antenna input to one of the plurality of antenna or transceiver structures;
- a first actuator coupled to the switching member, and adapted to switch a first contact on the switching member in or out of engagement with a second contact associated with a desired one of the plurality of antenna or transceiver structures;
- and
- a clutch assembly, adapted to passively engage with the switching member to prohibit movement thereof, and to actuatably disengage from the switching member to allow switching thereof.
Dependencies are inferred from the claim text.