Inspection device for transparent substrate end surface and inspection method therefor

Abstract

An inspection apparatus for inspecting an end face of a transparent substrate and an inspection method for inspecting an end face of a transparent substrate according to the present invention are capable of reliably and accurately detecting defects at the end face of the transparent substrate. When a display panel substrate 10 which is a transparent substrate to placed on a rotating table 21, a light is intermittently emitted from an end-face illuminating unit 39 arranged opposite to the end face of the display panel substrate 10. The light emitted along the surface of the substrate 10 is reflected from a lower reflecting mirror 42 toward the end face of the transparent substrate 10. The end face and an adjacent portion thereof are imaged by a CCD camera 36. Defects at the end face of the display panel substrate 10 are detected based on an image density of each pixel in the obtained image data.

Dependencies are inferred from the claim text.