High Throughput Inspection System and a Method for Generating Transmitted and/or Reflected Images

A method of optically inspecting an object for indicating the condition of the object, comprising the steps of:

• selecting an area sensor out of multiple area sensors and determining a manipulation of a short duration beam of radiation such that a short duration transmitted beam is sensed by the selected area sensor;
• manipulating, according to the determined manipulation, and reflecting the beam of radiation from one face of an area of the object to produce the short duration transmitted beam;
• sensing the short duration transmitted beam by the selected area sensor and generating output signals in response;
• selecting another area sensor out of the multiple area sensors and repeating a cycle of manipulating, transmitting and sensing until a predefined portion of the object is radiated;
• whereas during each cycle enabling output signals of a previously selected area sensor to be processed;
• and
• processing the output signals to provide an indication of the condition of the predefined portion of the object.

A high-throughput inspection system comprising:

• a controller, for selecting an area sensor out of multiple area sensors and determining a manipulation scheme of a short duration beam of radiation such that a short duration reflected beam is sensed by the selected area sensor;
• a illumination system for manipulating, according to the determined manipulation scheme, and reflecting the beam of radiation from one face of an area of the object to produce the short duration reflected beam;
• at least one sensor for sensing the short duration reflected beam by the selected area sensor and generating output signals in response;
• whereas the controller is further adapted to (i) select another area sensor out of the multiple area sensors and repeat a cycle of manipulating, reflecting and sensing until a predefined portion of the object is radiated;
• (ii) enable output signals of a previously selected area sensor to be processed, during a cycle;
• and (iii) process the output signals to provide an indication of the condition of the predefined portion of the object.

A high-throughput inspection system comprising:

• a controller, for selecting an area sensor out of multiple area sensors and determining a manipulation scheme of a short duration beam of radiation such that a short duration transmitted beam is sensed by the selected area sensor;
• an illumination system for manipulating, according to the determined manipulation scheme, and reflecting the beam of radiation from one face of an area of the object to produce the short duration transmitted beam;
• at least one sensor for sensing the short duration transmitted beam by the selected area sensor and generating output signals in response;
• whereas the controller is further adapted to :
• (i) select another area sensor out of the multiple area sensors and repeat a cycle of manipulating, transmitting and sensing until a predefined portion of the object is radiated;
• (ii) enable, during each cycle, output signals of a previously selected area sensor to be processed;
• and (iii) process the output signals to provide an indication of the condition of the predefined portion of the object.