Lithographic apparatus and device manufacturing method utilizing a positioning device for positioning an object table

A lithographic apparatus, comprising:

• an illumination system that supplies a beam of radiation;
• a patterning arrangement that patterns the beam;
• a projection system that projects the patterned beam onto a target portion of the substrate;
• and
• a positioning device that supports a substrate on an object table, comprising,
• a frame that supports the object table in a first direction, and
• a motor unit comprising a first part and a second part, the first part cooperating with the second part to generate first and second forces exerted on the object table, the first force being exerted on the object table in a second direction substantially perpendicular to the first direction and the second force being exerted on the object table in a third direction substantially perpendicular to the first direction and the second direction,
• wherein the first part is arranged on the object table, such that both the first force and the second force are directed substantially through a center of gravity of the object table.

A positioning device for positioning an object table, comprising:

• an object table;
• a frame that supports the object table in a first direction;
• and
• a motor unit that exerts a first force on the object table in a second direction substantially perpendicular to the first direction and a second force on the object table in a third direction substantially perpendicular to the first direction and the second direction, the motor unit comprising
• a first part comprising a coil unit of a first motor, the coil unit comprising a plurality of coils arranged adjacent to each other in the second direction, and
• a second part comprises a single-sided magnet assembly of the first motor, the single-sided magnet assembly comprising an array of permanent magnets,
• wherein the first part cooperates with the second part to generate the first and second forces.

A positioning device for positioning an object table, comprising

• an object table;
• a frame that supports the object table in a first direction;
• and
• a motor unit that exerts a first force on the object table in a second direction substantially perpendicular to the first direction and a second force on the object table in a third direction substantially perpendicular to the first direction and the second direction, wherein,
• a first part of the motor unit comprises a coil unit of a first motor, the coil unit comprising a plurality of coils arranged adjacent to each other in the second direction, each of the coils comprising two coil sides extending in the third direction and two end turn parts, and
• a second part of the motor unit comprises a magnet assembly of the first motor, the magnet assembly comprising two arrays of permanent magnets arranged on both sides of the coil unit,
• the coil unit is arranged asymmetrically between the two arrays of permanent magnets, such that substantially only one of the end turn parts of each coil is arranged in a magnetic field of the two arrays of permanent magnets.

A device manufacturing method, comprising

• patterning a beam of radiation;
• arranging a substrate on an object table;
• supporting the object table by a base frame in a first direction;
• projecting the patterned beam onto a target portion of the substrate;
• displacing the object table relative to the patterned beam using a motor unit that exerts a first force on the object table in a second direction substantially perpendicular to the first direction and exerts a second force on the object table in a third direction substantially perpendicular to the first direction and the second direction;
• generating the first and second forces based first and second parts of the motor unit;
• and
• arranging the first part on the object table, such that both the first force and the second force are directed substantially through a center of gravity of the object table.