Processing instrument and processing instrument system
AssigneeHitach High-Technologies Corporation
InventorsKoji Tomita, Takashi Noguchi, Kazuhiko Okuzawa, Akira Maekawa
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AssigneeHitach High-Technologies Corporation
InventorsKoji Tomita, Takashi Noguchi, Kazuhiko Okuzawa, Akira Maekawa
Estimating the term…
In a processing instrument in which detailed processing conditions can be set, it has been made possible that one achieves simplification of operations and prevention of operation errors and software having a track record in operation installed in a processing instrument and reused efficiently without modification. A function which receives detailed processing conditions from an input section, a function which executes a processing according to detailed processing conditions, and a function which displays the results of the processing in the display section are provided in an operation terminal; in addition to a research work processing section which is achieved by software having a track record in operation, a fixed processing condition database in which fixed processing conditions set to a predetermined values are stored and a routine work processing section which has a function for receiving variable processing conditions being a part of detailed processing conditions from an input section, a function for creating the detailed processing conditions necessary for the first processing section by combining the variable processing conditions and the fixed processing conditions received from the fixed processing condition data base, and a function for receiving a display content of the result of the processing from the research processing section and displaying it in the display section are provided.
A processing instrument which displays the results of processing by receiving processing conditions comprising:
A processing instrument system including a processing instrument to display the result of the processing by receiving processing conditions, a remote terminal, and a channel to connect said processing instrument to said remote terminal, wherein
Dependencies are inferred from the claim text.