Micro-electro mechanical switch designs

A DC RF switch comprising;

• a fixed electrode;
• at least one pull-down electrode;
• and
• a moving plate having a plurality of corrugations and a selective finger;
• said moving plate having at least one dimple that is formed on a selective portion of said moving plate and are positioned to come into contact with said electrode when said switch is closed so as to increase the contact force and lowering resistance between said moving plate and fixed electrode.

A RF switch comprising:

• a fixed electrode;
• at least one pull-down electrode;
• and
• a moving plate having a plurality of corrugations and a selective finger;
• said moving plate also having a selective portion that comprises a capacitive switch and a DC switch;
• said capacitive switch comprising a selective finger that comes into contact with said fixed electrode, said moving plate and fixed electrode are brought into intimate contact without necessarily having to apply a voltage between the two plates;
• said DC switch comprising at least one dimple that is formed on said selective portion of said moving plate and are positioned to come into contact with said fixed electrode when said switch is closed so as to increase the contact force and lower the resistance between said moving plate and fixed electrode.

A method of forming a capacitive RF switch:

• providing a fixed electrode;
• providing at least one pull-down electrode;
• and
• providing a moving plate having a plurality of corrugations and a selective finger that is formed on a selective portion of said moving plate, said moving plate and fixed electrode are brought into intimate contact without necessarily having to apply a voltage between the two plates.

A method of forming a DC RF switch comprising;

• providing a fixed electrode;
• forming at least one pull-down electrode;
• and
• forming a moving plate having a plurality of corrugations and a selective finger;
• said moving plate having at least one dimple that is formed on a selective portion of said moving plate and are positioned to come into contact with said electrode when said switch is closed so as to increase the contact force and lowering resistance between said moving plate and fixed electrode.

A method of forming an RF switch comprising:

• providing a fixed electrode;
• providing at least one pull-down electrode;
• forming a moving plate having a plurality of corrugations and a selective finger design;
• said moving plate also having a selective portion that comprises a capacitive switch and a DC switch;
• said capacitive switch comprising a selective finger that comes into contact with said fixed electrode, said moving plate and fixed electrode are brought into intimate contact without necessarily having to apply a voltage between the two plates;
• and
• said DC switch comprising at least one dimple that is formed on said selective portion of said moving plate and are positioned to come into contact with said fixed electrode when said switch is closed so as to increase the contact force and lower the resistance between said moving plate and fixed electrode.