Testing device and testing method of a semiconductor device
AssigneeFujitsu Limited
InventorsKazuhiro Tashiro, Yasuyuki Itou, Shigeyuki Maruyama, Yoshikazu Arisaka
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AssigneeFujitsu Limited
InventorsKazuhiro Tashiro, Yasuyuki Itou, Shigeyuki Maruyama, Yoshikazu Arisaka
Estimating the term…
A testing device can perform a test on an arbitrary one of a plurality of semiconductor devices by pressing the semiconductor devices onto a contactor from a back side of the semiconductor device. A test circuit board has a contactor provided with contact pieces corresponding to external connection terminals of semiconductor devices to be tested. A support board is capable of mounting the semiconductor devices thereon in an aligned state. A stage supports the support board. A press head presses the semiconductor devices to be tested mounted on the support board so as to cause external connection terminals of the semiconductor devices to be tested to contact with the contact pieces of the contactor. The stage is movable to a position at which at least one of the semiconductor devices to be tested, which are mounted on the support board, faces the contactor.
A testing device of a semiconductor device, comprising:
A testing device of a semiconductor device comprising:
16-20. (canceled)
Dependencies are inferred from the claim text.