Nanogripper device having length measuring function and method for lenghth measurement executed with nanogripper device having length measuring function
AssigneesAOI Electronics Co., Ltd., SII Nano Technology Inc.
InventorsTakashi Konno, Hiroki Hayashi, Toshihide Tani, Masamichi Oi, Masanao Munekane, Koji Iwasaki
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Abstract
A fixed electrode and a movable electrode used to drive each arm are disposed at a drive unit. As a voltage is applied between the fixed electrode and the movable the electrode, a coulomb force causes the movable the electrode to move, thereby driving the arms along the closing direction. The dimensions of a sample can be measured based upon the electrostatic capacity achieved between the electrodes when the sample becomes gripped by the arms.
Claims18
A nanogripper device having a length measuring function, comprising:
- a pair of arms that is opened and closed freely;
- an electrostatic actuator that drives the pair of arms to open/close the arms;
- a hold detection unit that detects that a sample has become gripped;
- a physical quantity detection unit that detects at least one physical quantity, either an electrostatic capacity or a voltage applied to the electrostatic actuator;
- and
- a dimension calculation unit that calculates dimensions of the sample based upon the physical quantity that is detected by the physical quantity detection unit when the hold detection unit detects that the sample has become gripped.
A method of length measurement executed with a nanogripper device having a length measuring function and having a pair of arms that can be opened and closed freely and an electrostatic actuator that drives the pair of arms to open/close the arms, comprising:
- detecting that a sample has become gripped;
- detecting at least one physical quantity, either an electrostatic capacity achieved when the sample has become gripped or a voltage applied to the electrostatic actuator when the sample has become gripped, upon detecting that the sample has become detected;
- and
- calculating dimensions of the sample based upon the detected physical quantity.
Dependencies are inferred from the claim text.