Actuator and micro-electromechanical system device
AssigneeKabushiki Kaisha Toshiba
InventorTamio Ikehashi
Life of this patent
Estimating the term…
Abstract
An actuator includes a movable beam supported on a substrate by a supporting portion, and having a first movable end and a second movable end. The second movable end is opposite to the first movable end with respect to the supporting portion. A first drive beam is connected to the movable beam at around the second movable end. The first drive beam is fixed on the substrate at an end portion of the first drive beam. A second drive beam is connected to the movable beam at a location between the supporting portion and the first movable end. The second drive beam is fixed on the substrate at another end portion of the second drive beam.
Claims20
An actuator comprising:
- a movable beam supported on a substrate by a supporting portion, the movable beam having a first movable end and a second movable end, the second movable end provided opposite to the first movable end with respect to the supporting portion;
- a first drive beam connected to the movable beam at around the second movable end of the movable beam, the first drive beam fixed on the substrate at an end portion of the first drive beam;
- and
- a second drive beam connected to the movable beam at a location between the supporting portion and the first movable end of the movable beam, the second drive beam fixed on the substrate at an end portion of the second drive beam.
A micro-electromechanical device, comprising:
- a movable beam supported on a substrate by a supporting portion, the movable beam having a first movable end and a second movable end, the second movable end provided opposite to the first movable end with respect to the supporting portion;
- a first drive beam connected to the movable beam at around the second movable end of the movable beam, the first drive beam fixed on the substrate at an end portion of the first drive beam;
- a second drive beam connected to the movable beam at a location between the supporting portion and the first movable end of the movable beam, the second drive beam fixed on the substrate at an end portion of the second drive beam;
- and
- a fixed electrode located above the substrate so as to face the first movable end.
Dependencies are inferred from the claim text.