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US 2006/0220494 A1Published application
Elastic boundary wave device, resonator, and ladder-type filter
AssigneesFujitsu Media Devices Limited, Fujitsu Limited
InventorsMichio Miura, Takashi Matsuda, Masanori Ueda, Seiichi Mitobe
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Abstract
An elastic boundary wave device includes a first medium that is piezoelectric, electrodes provided on the first medium to excite elastic waves, a dielectric film provided on the electrodes and the first medium, and a second medium provided on the dielectric film. The dielectric film mainly includes silicon oxide and a density thereof is at least 2.05 g/cm3.
Claims12
An elastic boundary wave device comprising:
- a first medium that is piezoelectric;
- excitation electrodes provided on the first medium to excite elastic waves;
- a dielectric film provided on the excitation electrodes and the first medium;
- and
- a second medium provided on the dielectric film,
- wherein the dielectric film mainly includes silicon oxide and a density thereof is at least 2.05 g/cm3.
3 more elements
A resonator comprising:
- a first medium that is piezoelectric;
- excitation electrodes provided on the first medium to excite elastic boundary waves and reflector electrodes provided on the first medium;
- a dielectric film provided on the excitation electrodes, the reflector electrodes and the first medium;
- and
- a second medium provided on the dielectric film,
- wherein the dielectric film mainly includes silicon oxide and a density thereof is at least 2.05 g/cm3.
3 more elements
A ladder-type filter comprising:
- a first medium that is piezoelectric;
- excitation electrodes provided on the first medium to excite elastic waves and reflector electrodes provided on the first medium, resonators including the excitation electrodes and the reflector electrodes being arranged in a ladder form;
- a dielectric film provided on the excitation and reflection electrodes and the first medium;
- and
- a second medium provided on the dielectric film,
- wherein the dielectric film mainly includes silicon oxide and a density thereof is at least 2.05 g/cm3.
3 more elements
Dependencies are inferred from the claim text.