Positioning system and linear motor
AssigneeCanon Kabushiki Kaisha
InventorKeiji Emoto
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Abstract
Disclosed is a positioning system and an exposure apparatus having the same, wherein in accordance with an aspect of the present invention the positioning system includes a stage being movable and being configured to carry an object thereon, an interferometer configured to measure a position of the stage, a driving system configured to drive the stage, and a heater provided between a light path of the interferometer and a coil which is a component element of the driving system. In one preferred form of the present invention, the heater has a film-like shape or it is formed as a portion of a cooling jacket that is configured to cover the coil.
Claims13
A positioning system, comprising:
- a stage being movable and being configured to carry an object thereon;
- an interferometer configured to measure a position of said stage;
- driving means configured to drive said stage;
- and
- a heater provided between a light path of said interferometer and a coil which is a component element of said driving means.
Dependencies are inferred from the claim text.