High-k thin film grain size control
AssigneeIntel Corporation
InventorCengiz Palanduz
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AssigneeIntel Corporation
InventorCengiz Palanduz
Estimating the term…
A method including depositing a suspension of a colloid comprising an amount of nano-particles of a ceramic material on a substrate; and thermally treating the suspension to form a thin film. A method including depositing a plurality of nano-particles of a ceramic material to pre-determined locations across a surface of a substrate; and thermally treating the plurality of nano-particles to form a thin film. A system including a computing device comprising a microprocessor, the microprocessor coupled to a printed circuit board through a substrate, the substrate comprising at least one capacitor structure formed on a surface, the capacitor structure comprising a first electrode, a second electrode, and a ceramic material disposed between the first electrode and the second electrode, wherein the ceramic material comprises columnar grains.
A method comprising:
A method comprising:
A system comprising:
The system of claim 16, wherein at least one of the first electrode and the second electrode comprises a copper material.
A method comprising:
Dependencies are inferred from the claim text.