Thermopile-based gas sensor

A method of manufacturing a sensor, comprising:

• disposing a sacrificial layer on a substrate;
• disposing a low-thermal-conductivity layer on the sacrificial layer;
• disposing a first set of conductive arms and a second set of conductive arms on the low-thermal-conductivity layer to form a plurality of thermal junctions, wherein the plurality of thermal junctions is adapted to form a plurality of hot junctions and a plurality of cold junctions when subjected to a difference in temperature;
• and
• removing the sacrificial layer and a portion of the low-thermal-conductivity layer to form a cavity therein, wherein the cavity is configured to provide insulation for the plurality of hot junctions.

A sensor, comprising:

• a substrate;
• a sacrificial layer disposed on the substrate;
• a low-thermal-conductivity layer disposed on the sacrificial layer;
• and
• a first set of conductive arms and a second set of conductive arms disposed on the low-thermal-conductivity layer to form a plurality of thermal junctions, wherein the plurality of thermal junctions is adapted to form a plurality of hot junctions and a plurality of cold junctions when subjected to a difference in temperature, and wherein the sacrificial layer and the low-thermal-conductivity layer include a cavity etched therebetween.