Structure for an LDMOS transistor and fabrication method thereof
AssigneeVanguard International Semiconductor Corporation
InventorsJia-Wei Yang, Da-Pong Chang, Chih-Cherng Liao
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Abstract
A structure for an LDMOS transistor has a horseshoe-shaped gate layer formed on an N-type layer of a semiconductor silicon substrate, in which the gate layer comprises a transverse-extending area, a first lengthwise-extending area connected to a left end of the transverse-extending area and a second lengthwise-extending area connected to a right end of the transverse-extending area. A first P-type body is formed in the N-type layer, and overlaps the left periphery of the first lengthwise-extending area of the gate layer. A second P-type body is formed in the N-type layer, and overlaps the right periphery of the second lengthwise-extending area of the gate layer.
Claims7
A structure for an LDMOS transistor, comprising:
- a semiconductor silicon substrate having a surface region of a first conductive type;
- a horseshoe-shaped gate layer formed on the semiconductor silicon substrate, in which the gate layer comprises a transverse-extending area, a first lengthwise-extending area connected to a left end of the transverse-extending area and a second lengthwise-extending area connected to a right end of the transverse-extending area;
- a first source region of the first conductive type formed in the surface region of the semiconductor silicon substrate and disposed at the left periphery of the first lengthwise-extending area of the gate layer;
- a second source region of the first conductive type formed in the surface region of the semiconductor silicon substrate and disposed at the right periphery of the second lengthwise-extending area of the gate layer;
- a first drain region of the first conductive type formed in the surface region of the semiconductor silicon substrate and disposed between the first lengthwise-extending area and the second lengthwise-extending area of the gate layer;
- a first ion-diffusion body of a second conductive type formed in the surface region of the semiconductor silicon substrate and surrounding the sidewalls and bottom of the first source region;
- and
- a second ion-diffusion body of a second conductive type formed in the surface region of the semiconductor silicon substrate and surrounding the sidewalls and bottom of the second source region;
- wherein, the left periphery of the first lengthwise-extending area of the gate layer overlaps the periphery of the first ion-diffusion body to form a first overlapping portion, and the right periphery of the second lengthwise-extending area of the gate layer overlaps the periphery of the second ion-diffusion body to form a second overlapping portion.
Dependencies are inferred from the claim text.