Photodiode with controlled current leakage
AssigneeUDT Sensors, Inc.
InventorsPeter Bui, Narayan Taneja
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Abstract
The present invention is directed towards radiation detectors and methods of detecting incident radiation. In particular the present invention is directed towards photodiodes with controlled current leakage detector structures and a method of manufacturing photodiodes with controlled current leakage detector structures. The photodiodes of the present invention are advantageous in that they have special structures to substantially reduce detection of stray light. Additionally, the present invention gives special emphasis to the design, fabrication, and use of photodiodes with controlled leakage current.
Claims17
A photodiode array comprising:
- a substrate having at least a front side and a back side;
- a plurality of photodiodes integrally formed in the substrate forming said array;
- a plurality of electrical contacts in electrical communication with said front side;
- a plurality of suction diodes positioned at selected locations within the array;
- and
- at least one metal layer on said array, wherein the fabrication of said array involves a masking process comprising the steps of:
- applying a first metallization layer on said front side and
- applying a second metallization layer on said front side and subsequently creating an aperture to an active area.
A photodiode array comprising:
- a substrate having at least a front side and a back side;
- a plurality of photodiodes integrally formed in the substrate forming the said array;
- a plurality of electrical contacts in electrical communication with said front side;
- and
- a plurality of suction diodes positioned at selected locations within the array, wherein the fabrication of said array involves a masking process comprising the steps of:
- applying a n+ mask on said front side,
- applying a p+ mask on said front side,
- applying a first metal layer of said front side,
- applying an insulation layer on said front side, and
- applying a second metal layer on said front side.
Dependencies are inferred from the claim text.