Method of measuring ion beam position

An ion beam measurement apparatus, comprising:

• a first elongate sensor, wherein the first elongate sensor extends in a first direction along a plane of the measurement apparatus, and wherein the first elongate sensor is operable to sense one or more characteristics of an ion beam;
• a second elongate sensor, wherein the second elongate sensor extends along the plane of the measurement apparatus at an oblique angle with respect to the first elongate sensor, and wherein the second elongate sensor is further operable to sense the one or more characteristics of the ion beam;
• and
• a translation mechanism operably coupled to the measurement apparatus, wherein the translation mechanism is operable to translate the measurement apparatus through a path of the ion beam in a direction generally perpendicular to the first elongate sensor and generally parallel with the plane.

A method for measuring a position of an ion beam, the method comprising:

• providing an ion beam and a measurement apparatus having a plane associated therewith, the measurement apparatus further comprising a first elongate sensor and a second elongate sensor associated with the plane of the measurement apparatus, wherein the second elongate sensor is positioned generally obliquely with respect to the first elongate sensor;
• translating the measurement apparatus in a first direction generally perpendicular to the first elongate sensor through the ion beam;
• obtaining a first peak beam current associated with the first elongate sensor passing through the ion beam at a first time;
• obtaining a second peak beam current associated with the second elongate sensor passing through the ion beam at a second time;
• and
• determining a first beam position of the ion beam in the first direction and a second beam position of the ion beam in a second direction perpendicular to the first direction, wherein the first direction and second direction are parallel with the plane of the measurement apparatus, and wherein the determination is based, at least in part, on the first time, the second time, and an angle at which the first and second sensors are positioned relative to one another.