Method and equipment for judging target by tera heltz wave spectrometry
AssigneeRiken
InventorsYuki Watanabe, Kodo Kawase, Tomofumi Ikari
Life of this patent
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Abstract
A method includes a spectroscopic measurement step of pre-measuring a spectrum [S] of tera-hertz wave absorbencies of a target component for a plurality of frequencies ranging about from 1 THz to 3 THz, and an object spectroscopic step of irradiating an object with tera-hertz-waves of the plurality of frequencies to measure absorbencies I of the object. Presence and absence of the target component in the object is determined on the basis of the spectrum [S] of the absorbancy S and the spectrum [I] of the absorbancy I of the object.
Claims10
A method of inspecting a target by tera-hertz wave spectroscopic measurement, comprising:
- a spectroscopic measurement step of pre-measuring a spectrum [S] of tera-hertz wave absorbencies of a target component for a plurality of frequencies ranging about from 1 THz to 3 THz;
- and
- an object spectroscopic step of irradiating an object with tera-hertz waves of the plurality of frequencies to measure absorbencies I of the object,
- wherein presence and absence of the target component in the object is determined on the basis of the spectrum [S] of the absorbancy S and the spectrum [I] of the absorbancy I of the object.
An apparatus for inspecting a target using tera-hertz wave spectroscopic measurement, comprising:
- a tera-hertz wave generation device (12) that generates tera-hertz waves (4) of a plurality of wavelengths;
- a two-dimensional scan device (18) that scans an object (10) with the tera-hertz waves of the plurality of wavelengths,
- a spectroscopic measurement device (14) that measures a two-dimensional distribution [I] of light absorbancy I of the object;
- and
- a target density calculation device (16) that calculates a two-dimensional distribution [P] of a target density P on the basis of a pre-measured spectrum [S] of light absorbancy S of a target and the two-dimensional distribution [I] of the light absorbancy I.
Dependencies are inferred from the claim text.