Imaging apparatus for high probe currents
AssigneeICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
InventorRalf Degenhardt
Life of this patent
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Abstract
An imaging apparatus is provided, comprising a first lens, a Wien filter having a first opening and a second opening, and further comprising a 2*m-pole element, m≧2, and a second lens, wherein said first lens is disposed upstream said first opening of the Wien filter and said second lens is disposed downstream said second opening of the Wien filter, and an intermediate image plane of the first lens is located between said first opening and said first lens and an intermediate object plane of the second lens is located between said second opening and said second lens, and wherein said Wien filter is adapted for dispersion-free imaging of a stigmatic image formed in said intermediate image plane of said first lens into a stigmatic image formed in said intermediate object plane of said second lens.
Claims27
An imaging apparatus, comprising
- a first lens;
- a Wien filter having a first opening and a second opening, and further comprising a 2*m-pole element, wherein, m≧2;
- a second lens;
- wherein said first lens is disposed upstream of said first opening of the Wien filter and said second lens is disposed downstream of said second opening of the Wien filter, and an intermediate image plane of the first lens is located between said first opening and said first lens and an intermediate object plane of the second lens is located between said second opening and said second lens;
- and
- wherein said Wien filter is adapted for dispersion-free imaging of a stigmatic image formed in said intermediate image plane of said first lens into a stigmatic image formed in said intermediate object plane of said second lens.
A charged particle apparatus comprising:
- A charge particle source;
- An imaging apparatus including:
- a first lens;
- a Wien filter having a first opening and a second opening, and further, comprising a 2*m-pole element, wherein, m≧2;
- a second lens;
- wherein said first lens is disposed upstream of said first opening of the Wien filter and said second lens is disposed downstream of said second opening of the Wien filter, and an intermediate image plane of the first lens is located between said first opening and said first lens and an intermediate object plane
- of the second lens is located between said second opening and
- said second lens;
- wherein said Wien filter is adapted for dispersion-free imaging of a stigmatic image formed in said intermediate image plane of said first lens into a stigmatic image formed in said intermediate object plane of said second lens;
- and
- wherein the charged particle apparatus is adapted to switch between a high probe current mode and a monochromator mode.
A method of operating an imaging apparatus, comprising:
- (a) forming a stigmatic image essentially in an intermediate image plane of a first lens;
- (b) dispersion-free imaging of said stigmatic image essentially into an intermediate object plane of a second lens;
- and
- (c) forming a stigmatic image essentially in the intermediate object plane of the second lens.
A method of operating a charged particle apparatus, comprising the steps of:
- (a) operating said charged particle apparatus in a high probe current mode or a monochromator mode;
- and
- (b) switching said charged particle apparatus into a monochromator mode or a high probe current mode.
Dependencies are inferred from the claim text.