Charged particle beam equipment

Charged particle beam equipment comprising:

• a charged particle beam source for generating a charged particle beam;
• a specimen stand for holding a specimen;
• a lens system for focusing the charged particle beam onto the specimen;
• a scanner for scanning the charged particle beam on the specimen;
• a deflector for deflecting the charged particle beam;
• a detector for detecting a specimen signal generated from the specimen by irradiation of the charged particle beam thereto;
• an image processing unit for processing an image;
• and
• a display unit for displaying a specimen image,
• wherein a magnification error of a first magnification is derived by extracting a periodical dimension from an enlarged image of the specimen having a known periodical structure recorded at the first magnification by said image processing unit, an enlarged image of the specimen having a non-periodical structure is recorded at the first magnification corrected for the magnification error as a reference image, the enlarged view of the specimen having the non-periodical structure is recorded as an evaluation image after a visual field has been moved by controlling said deflector, a ratio of a control amount of said deflector to a visual field moving amount is found from a visual field moving amount of the evaluation image with respect to the reference image measured by said image processing unit, the magnification is set to a second magnification different from the first magnification, a visual field moving amount of an enlarged view of the non-periodical structure specimen is found before and after the visual field is moved by controlling said deflector, the second magnification is calibrated from a ratio of the visual field moving amount at the second magnification to the visual field moving amount at the first magnification corrected for the magnification error.

Charged particle beam equipment comprising:

• a charged particle beam source for generating a charged particle beam;
• a specimen stand for holding a specimen;
• a lens system for focusing the charged particle beam onto the specimen;
• a scanner for scanning the charged particle beam on the specimen;
• a deflector for deflecting the charged particle beam;
• a detector for detecting a specimen signal generated from the specimen by irradiation of the charged particle beam thereto;
• an image processing unit for processing an image;
• a display unit for displaying a specimen image;
• and
• a specimen image rotation unit for rotating a specimen image,
• wherein a magnification error of a first magnification is derived by extracting a periodical dimension from an enlarged image of the specimen having a known periodical structure recorded at the first magnification by said image processing unit, an enlarged image of a specimen having a non-periodical structure is recorded at the first magnification corrected for the magnification error as a reference image, the enlarged view of the specimen having the non-periodical structure is recorded as an evaluation image after a visual field has been moved by controlling said deflector, a ratio of a control amount of said deflector to a visual field moving amount is found from a visual field moving amount of the evaluation image with respect to the reference image measured by said image processing unit, the specimen image is rotated by said specimen image rotation unit to display a rotated specimen image, a visual field moving amount of an enlarged view of the non-periodical structure specimen is found before and after the visual field is moved by controlling said deflector, and the magnification is calibrated for the specimen image rotated by said specimen image rotation unit from a ratio of a visual field moving amount when the specimen image is rotated to a visual field moving amount of the enlarged specimen image not rotated.