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OwnerTakeshi Ogashiwa, Mitsugu Sato +1inventors
InventorsTakeshi Ogashiwa, Mitsugu Sato, Atsushi Takane
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A sample image display method and an image shift sensitivity measuring method to be executed in a charged particle beam apparatus are provided for accurately correcting an image drift in any observing and analyzing condition such as an accelerating voltage, a working distance or a raster rotation. When obtaining a reference image used for detecting a drift, the process is executed to obtain an image having the different image shift amount from that of the reference image at a time and to occasionally measure an image shift sensitivity. Then, the process is executed to automatically register this reference image and the image shift sensitivity and to detect a drift amount and control an image shift (correct a drift) according to the registered conditions when correcting the drift.
A charged particle beam apparatus comprising:
A sample image display method of displaying a magnified image of a sample through the use of a signal obtained from said sample by an irradiated primary charged particle beam, comprising the steps of:
A method of measuring a sensitivity of said image shift deflector for moving a visual field by moving an irradiated area of a primary charged particle beam emitted from a charged particle beam source, said image shift deflector included in a charged particle beam apparatus for displaying a magnified image of said sample by using a signal generated from said sample by said irradiated primary charged particle beam, comprising the steps of:
Dependencies are inferred from the claim text.