Substrate transfer apparatus, method of transferring substrate, and method of manufacturing electro-optical device

A method of transferring a substrate stored in support grooves in inner walls of a first substrate storage case to a substrate storage surface in a second substrate storage case, the method comprising:

• causing a substrate transfer mechanism to draw the substrate out from the first substrate storage case and to transfer the substrate to a substrate placement section of a substrate placing mechanism;
• causing a substrate holding mechanism to hold, at a hold position, the substrate placed in the substrate placement section;
• causing a transport mechanism to transport the substrate holding mechanism from the hold position to discharge position;
• and
• causing the substrate holding mechanism to discharge the substrate at the discharge position and to dispose the substrate on the substrate storage surface of the second substrate storage case, which is placed on a second-substrate-storage-case placement section.

A method of manufacturing an electro-optical device by transferring a substrate in support grooves in inner walls of a first substrate storage case to a substrate storage surface of a second substrate storage case, the method comprising:

• causing a substrate transfer mechanism to draw the substrate from the first substrate storage case and to transfer the substrate to a substrate placement section of a substrate placing mechanism;
• causing a substrate holding mechanism to hold, at a hold position, the substrate placed in the substrate placement section;
• causing a transport mechanism to transport the substrate holding mechanism from the hold positions to discharge positions;
• and
• causing the substrate holding mechanism to discharge, at the discharge position, the substrate and to dispose the substrate on the substrate storage surface of the second substrate storage case placed on a second-substrate-storage-case placement section.