Substrate for electronic device and method of manufacturing the same

A method of manufacturing a substrate for an electronic device, the method comprising:

• forming a contact hole in an interlayer dielectric covering a switching device formed on a base substrate so as to communicate with a terminal of the switching device;
• supplying a conductive material by a vapor phase process to form a conductive material layer on the interlayer dielectric in a region including a formation area;
• filling a filler material selectively in a space inside of the conductive material layer within the contact hole by a liquid phase process;
• supplying a mask material by a liquid phase process to form a mask having a shape corresponding to the formation area;
• and
• removing an unnecessary portion of the conductive material layer with use of the mask to form a pixel electrode and an electrically connecting portion connected to the pixel electrode on the interlayer dielectric in the formation area.

A method of manufacturing a substrate for an electronic device, the method comprising:

• forming a contact hole in an interlayer dielectric covering a switching device formed on a base substrate so as to communicate with a terminal of the switching device;
• supplying a conductive material by a vapor phase process to form a conductive material layer on the interlayer dielectric in a region including a formation area;
• supplying a filler material by a liquid phase process to form a filler material layer, having a shape corresponding to the formation area, on the conductive material layer;
• removing an unnecessary portion of the conductive material layer while using the filler material layer as a mask;
• and
• removing an unnecessary portion of the filler material layer to form a pixel electrode and an electrically connecting portion connected to the pixel electrode on the interlayer dielectric in the formation area.

A method of manufacturing a substrate for an electronic device, the method comprising:

• forming a contact hole in an interlayer dielectric covering a switching device formed on a base substrate so as to communicate with a terminal of the switching device;
• supplying a conductive material by a vapor phase process to form a conductive material layer on the interlayer dielectric in a region including a formation area;
• supplying a filler material by a liquid phase process to form a filler material layer on the conductive material layer;
• supplying a mask material by a liquid phase process to form a mask having a shape corresponding to the formation area;
• and
• collectively removing unnecessary portions of the filler material layer and the conductive material layer with use of the mask to form a pixel electrode and an electrically connecting portion connected to the pixel electrode on the interlayer dielectric in the formation area.

A display device comprising:

• a first substrate including
• a base substrate,
• a switching device formed on the base substrate, the switching device having a terminal,
• an interlayer dielectric formed so as to cover the switching device, the interlayer dielectric having a contact hole extending therethrough so as to communicate with the terminal of the switching device,
• a pixel electrode formed on the interlayer dielectric, and
• an electrically connecting portion connected to the pixel electrode, the electrically connecting portion including
• (i) a conductive film formed on an inner surface of the contact hole and a surface of the terminal by a vapor phase process, and
• (ii) a filler material filled in a space inside of the conductive film within the contact hole;
• a second substrate opposed to the first substrate;
• and
• a display area interposed between the first substrate and the second substrate.

An electronic device comprising:

• a display device having
• a first substrate including
• a base substrate,
• a switching device formed on the base substrate, the switching device having a terminal,
• an interlayer dielectric formed so as to cover the switching device, the interlayer dielectric having a contact hole extending therethrough so as to communicate with the terminal of the switching device,
• a pixel electrode formed on the interlayer dielectric, and
• an electrically connecting portion connected to the pixel electrode, the electrically connecting portion including
• (i) a conductive film formed on an inner surface of the contact hole and a surface of the terminal by a vapor phase process, and
• (ii) a filler material filled in a space inside of the conductive film within the contact hole;
• a second substrate opposed to the first substrate;
• and
• a display area interposed between the first substrate and the second substrate.