Method for filling water and device for filling water
AssigneesDenso Corporation, To-Ou Kogyo Co., Ltd.
InventorsTetsuya Sakakibara, Noriyasu Kumaki
Life of this patent
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Abstract
Highly-pure water is stored into a storage tank 46 by reducing an impurity-ion content to not greater than a specified rate by removing impurity ions via a device 43, for manufacturing pure water, containing ion-exchange resin, and by reducing a dissolved-oxygen content to not greater than a specified rate by heating-deaerating with a heater 44 and reducing the pressure during storage in the storage tank 46. Highly-pure water to be stored is injected from a gun 10 into a vessel body 1 while detecting a flow-rate via a mass-flow meter 53. Therefore, a highly-accurate amount of water, with high purity, can be filled into the vessel body 1.
Claims12
A method of filling a specified amount of highly-pure water, of which an impurity-ion content is not greater than a specified rate, and a dissolved-oxygen content is not greater than a specified rate, into a vessel body (1) which can form a closed structure, characterized by comprising
- a storing step (46, 200) of storing water, of which the impurity-ion content is not greater than the specified rate, under a reduced pressure atmosphere so that the dissolved-oxygen content becomes not greater than the specified rate, and
- an injecting step (300) of injecting a specified mass of water stored at the storing step (46, 200) into the vessel body (1).
A device for filling a specified amount of highly-pure water, of which an impurity-ion content is not greater than a specified rate, and a dissolved-oxygen content is not greater than a specified rate, into a vessel body (1) which can form a closed structure, characterized by comprising
- a storage tank (46) for storing water, of which the impurity-ion content is not greater than a specified rate, under a reduced pressure atmosphere so that the dissolved-oxygen content becomes not greater than a specified rate,
- connecting-injecting means (10) for connecting with the vessel body (1), and injecting water stored in the storage tank (46) into the vessel body (1), and
- mass-flow-rate detecting means (53) for detecting a mass-flow rate of water to be supplied from the storage tank (46) to the connecting-injecting means (10).
Dependencies are inferred from the claim text.