US 2006/0219274 A1Published application

Substrate processing apparatus

AssigneeDainippon Screen Mfg. Co., Ltd.

InventorTomomi Iwata

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Abstract

A dry-air supplying duct and a dry-air exhaust duct are opposite each other across a processing tank. Inside the dry-air supplying duct, a plurality of ventilation guides are provided that extend horizontally by a predetermined length from an end of the dry-air supplying duct, and a plurality of ventilation paths are formed by the plurality of ventilation guides. To an end of the dry-air supplying duct, a partition plate is attached such that it blocks a part of the plurality of ventilation paths. Also inside the dry-air supplying duct, a partition plate is attached such that it blocks a part of the plurality of ventilation paths. These partition plates are disposed in upper part of the dry-air supplying duct. As a result, an opening for injection of dry air is formed in a lower part of the dry-air supplying duct.

Claims20

Dependent claims

A substrate processing apparatus for performing a predetermined process on a substrate, comprising:

a processing tank that stores a processing liquid;
a substrate moving up/down device that moves up/down a substrate between a position in the processing liquid stored in said processing tank and a position above said processing tank;
and
a gas supplying device that supplies gas to a substrate that is being drawn up from said processing tank by said substrate moving up/down device,
said gas supplying device including
a gas supplying duct disposed on one lateral side of said processing tank, for supplying gas from said one lateral side to the other lateral side of said processing tank along an upper end of said processing tank and
a gas supplying system that supplies gas to said gas supplying duct,
said gas supplying duct having a flow-in space into which the gas supplied from said gas supplying system is fed, and a gas flow outlet extending substantially horizontally, for flowing out the gas toward said processing tank,
said gas flow outlet being provided such that a cross section of gas flow from said gas supplying duct to said processing tank is smaller than an area from an upper end of said flow-in space to a lower end of said flow-in space in a vertical direction.

6 more elements

Dependencies are inferred from the claim text.

Facts

Application: 11/401,668Filed 27 Mar 2006
Priority: JP 2005-09578829 Mar 2005
Published: 5 Oct 2006
Term ends: Not estimatedThe source records don’t support an estimate.

Classification6 codes

B08B 3/10
Cleaning involving contact with liquid: with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by…
B08B 3/102
With additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration: with means for agitating the…
H10P 72/0406
Apparatus for fluid treatment: for cleaning followed by drying, rinsing, stripping, blasting or the like
H10P 72/0408
For cleaning followed by drying, rinsing, stripping, blasting or the like: for drying