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US 2006/0219176 A1Published application
Processing device
AssigneeNGK Insulators, Ltd.
InventorsYasumitsu Tomita, Yutaka Unno
Life of this patent
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Abstract
A processing device includes a base which holds a processing target. In the base, a gas providing passage circular in cross section, which provides gas to an outer circumference of the base, is formed.
Claims7
A processing device, comprising:
- a base which holds a processing target,
- wherein a gas providing passage circular in cross section is formed in the base, the gas providing passage providing gas to an outer circumference of the base.
Dependencies are inferred from the claim text.