Applicator device
AssigneeToray Engineering Co., Ltd.
InventorsJunichi Uehara, Takashi Iwade
Life of this patent
Estimating the term…
Loading patent…
AssigneeToray Engineering Co., Ltd.
InventorsJunichi Uehara, Takashi Iwade
Estimating the term…
An applicator device comprises a reservoir tank trapping embrocation, a stage holding a substrate, a ferrule having a slit-shaped opening section above the stage, a fluid transfer pump guiding the embrocation within the reservoir tank to the ferrule, a first opening and closing valve between a suction opening of the fluid transfer pump and the reservoir tank, opening when a suction operation is carried out and closing when a discharge operation is carried out, a second opening and closing valve between a discharge opening of the fluid transfer pump and the ferrule, opening when a discharge operation is carried out and closing when a suction operation is carried out, and driving means relatively moving the ferrule and/or substrate when the slit-shaped opening section and the substrate are adjacent to one another, wherein the fluid transfer pump comprises a membranous sealing member sealing a gap between a cylinder and a plunger.
An applicator device comprising;
Dependencies are inferred from the claim text.