Back to results
US 2006/0219158 A1Published application
Body having a smooth diamond layer, device and method therefor
AssigneeCemeCon AG
InventorsDirk Breidt, Oliver Lemmer, Martin Frank
Life of this patent
Estimating the term…
Loading patent…
Loading patent…
AssigneeCemeCon AG
InventorsDirk Breidt, Oliver Lemmer, Martin Frank
Estimating the term…
The invention refers to a method and apparatus for CVD coating and to a coated body. To improve the mechanical properties of the structure and surface of the body and to make the method and apparatus as simple and cost-effective as possible, it is suggested in the method, in which a layer is deposited on a substrate in a carbon-containing gas atmosphere: that the process parameters be varied during the coating period in such a way that during the coating period a first operating mode and a second operating mode are repeatedly alternated, wherein in the first operating mode a higher carbon over-saturation of the gas atmosphere occurs near the substrate, and in the second operating mode a lower carbon over-saturation of the gas atmosphere occurs near the substrate. In this way, a body can be produced with a substrate and at least one layer deposited on the surface of the substrate, wherein the layer consists of nano-crystalline diamond.
1-7. (canceled)
A body comprising a substrate made out of cemented carbide or silicon, and at least one layer of nanocrystalline diamond arranged directly on a surface of said substrate, where a surface of said layer has a surface roughness Rz which is less than the surface roughness Rz of said substrate surface.
Method for CVD coating, where in a coating procedure under a carbon-containing gas atmosphere a diamond layer is deposited directly on a substrate made out of cemented carbide or silicon, where during said coating procedure, process parameters are varied such that said parameters are changed multiple times between a first and a second operating state,
Dependencies are inferred from the claim text.