Back to results
US 2006/0219022 A1Published application
Pressure sensor system
AssigneeHitachi, Ltd.
InventorsHiroyuki Ohta, Takashi Sumigawa
Life of this patent
Estimating the term…
Abstract
In order to realize a compact wireless pressure sensor system which transmits an accurate pressure value, the present invention provides a pressure sensor system constructed at least by a silicon chip on which a circuit operated by electromagnetic wave energy is mounted, and a film which supports an antenna, in which film a through-hole is provided in the vicinity of a diaphragm part.
Claims10
A pressure sensor system, comprising:
- a semiconductor chip comprising a pressure sensor and a transmit control part to which a signal based on a measurement value of the pressure sensor is inputted;
- and
- an antenna member to which said semiconductor chip is fixed, the antenna member comprising an antenna electrically connected to the transmit control part, wherein
- said antenna member comprises a notched part in an area which overlaps said semiconductor chip.
1 more element
A pressure sensor system, comprising:
- a semiconductor chip comprising a pressure sensor and a transmit control part to which a signal based on a measurement value of the pressure sensor is inputted;
- and
- an antenna member to which said semiconductor chip is fixed, the antenna member comprising an antenna electrically connected to the transmit control part, wherein
- the pressure sensor system is formed so that a surface of said semiconductor chip on an opposite side to a surface on which the transmit control circuit is formed is supported by said antenna member.
1 more element
Dependencies are inferred from the claim text.