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US 2006/0219020 A1Published application
Pressure sensor having thin pressure sensing membrane
AssigneeSilverbrook Research Pty Ltd
InventorsKia Silverbrook, Samuel Mallinson
Life of this patent
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Abstract
A pressure sensor is provided having a chamber partially defined by a flexible membrane which is less than three microns thick, exposed to fluid pressure and is configured to deflect from a reference position due to changes in the fluid pressure, and associated circuitry for converting the deflection of the flexible membrane into an output signal indicative of the fluid pressure.
Claims19
A pressure sensor comprising:
- a chamber partially defined by a flexible membrane which is less than three microns thick and is exposed to fluid pressure, the flexible membrane being configured to deflect from a reference position due to changes in said fluid pressure;
- and
- associated circuitry for converting the deflection of the flexible membrane into an output signal indicative of the fluid pressure.
Dependencies are inferred from the claim text.