US 2006/0219013 A1 · Ultrasonic inspection method and ultrasonic inspection equipment

Abstract

In the ultrasonic inspection method and equipment, a high-resolution and high-S/N-ratio inspection image can be speedily acquired with ease-of-operability. Inspection of the inside of the inspection target is performed by changing incident angle of the ultrasonic wave oscillated from the array-probe ultrasonic sensor. Then, while performing the inspection, the array-probe ultrasonic sensor is sequentially displaced from the position to the position via the position by using the displacement member. This displacement allows acquisition of inspection images on each position basis. Finally, the inspection images thus acquired are visualized as a processed image by adding or averaging the inspection images by shifting the images by displacement quantity of the array-probe ultrasonic sensor.

Claims11

Dependent claims

An ultrasonic inspection method, comprising the steps of:

displacing transmission/reception position of ultrasonic wave relative to an inspection target by an array-probe ultrasonic sensor,
performing inspection of said inspection target in accordance with sectorial scan scheme by using said array-probe ultrasonic sensor at said plurality of transmission/reception positions, and
creating a single image from respective inspection result images at said plurality of transmission/reception positions.

Ultrasonic inspection equipment, comprising:

an array-probe ultrasonic sensor including a plurality of piezoelectric vibration elements,
a pulser for supplying a transmission signal to each piezoelectric vibration element of said array-probe ultrasonic sensor,
a receiver for inputting a reception signal from each piezoelectric vibration element of said array-probe ultrasonic sensor,
a delay control unit for setting a delay time to said transmission signal and said reception signal, said delay time being different on each piezoelectric-vibration-element basis,
a data storage unit for storing ultrasonic waveforms received at said array-probe ultrasonic sensor,
sensor displacement means for scanning said array-probe ultrasonic sensor with respect to an inspection target,
a scan control unit for controlling said scan,
a displacement-quantity detection unit for measuring displacement quantity of said array-probe ultrasonic sensor,
an image-processing computer for generating a plurality of inspection images from said ultrasonic waveforms stored in said data storage unit, and adding or averaging said plurality of inspection images by shifting said images by the amount of said displacement quantity measured in said displacement-quantity detection unit of said array-probe ultrasonic sensor, and
a display unit for displaying said inspection images and an inspection image acquired from said addition.

7 more elements

Ultrasonic inspection equipment, comprising:

an array-probe ultrasonic sensor including a plurality of piezoelectric vibration elements whose number is larger than a number needed for operation as said array-probe ultrasonic sensor,
a pulser for supplying a transmission signal to each piezoelectric vibration element of said array-probe ultrasonic sensor,
a transmission switching circuit for switching a piezoelectric vibration element to which, of said respective piezoelectric vibration elements of said array-probe ultrasonic sensor, said output from said pulser will be supplied,
a receiver for inputting a reception signal from each piezoelectric vibration element of said array-probe ultrasonic sensor,
a reception switching circuit for switching a piezoelectric vibration element which, of said respective piezoelectric vibration elements of said array-probe ultrasonic sensor, will supply said reception signal to said receiver,
a delay control unit for setting a delay time to said transmission signal and said reception signal, said delay time being different on each piezoelectric-vibration-element basis,
a data storage unit for storing ultrasonic waveforms received at said array-probe ultrasonic sensor,
sensor displacement means for scanning said array-probe ultrasonic sensor with respect to an inspection target,
a scan control unit for controlling said scan,
a displacement-quantity detection unit for measuring displacement quantity of said array-probe ultrasonic sensor,
an image-processing computer for generating a plurality of inspection images from said ultrasonic waveforms stored in said data storage unit, and adding or averaging said plurality of inspection images by shifting said images by the amount of said displacement quantity measured in said displacement-quantity detection unit of said array-probe ultrasonic sensor, and
a display unit for displaying said inspection images and an inspection image acquired from said addition.

9 more elements

Dependencies are inferred from the claim text.

Ultrasonic inspection method and ultrasonic inspection equipment

Life of this patent

Ultrasonic inspection method and ultrasonic inspection equipment

Life of this patent

Abstract

Claims11