Gyro vibration piece, gyro sensor, and method of manufacturing gyro vibration piece

A method of manufacturing a gyro vibration piece which includes a supporting part;

• a driving part connected to the supporting part and performing vibration;
• a detection part connected through the driving part and the supporting part and detecting detection vibration generated by Coriolis force generated by the rotation of the driving part;
• and a connection part including a connection portion having a plurality of steps formed between a side of a width direction of the driving part or a side of a width direction of the detection part and a side of another portion connected to the driving part or the detection part, which are continuously connected, the method comprising:
• forming a first mask on a surface of a piezoelectric substrate;
• forming a first external shape by performing a first etching process to remove the piezoelectric substrate on an opening of the first mask;
• forming a second mask on a surface of the first external shape;
• and
• forming a second external shape, in which part of the first external shape is removed, by performing a second etching process to remove the piezoelectric substrate on an opening of the second mask,
• wherein in the forming of a second external shape, a first end portion, which has a circular arc shaped wall portion that connects a side of a width direction of the driving part or a side of a width direction of the detection part to a side of another portion connected to the driving part or the detection part, and a bottom surface having a predetermined depth, is formed on an inner side than a wall portion formed on the innermost side among the connection portion formed by the process of forming the first external shape.