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US 2006/0219006 A1Published application
Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
AssigneeInvenSense, Inc.
InventorsSteven Nasiri, Joseph Seeger, Martin Lim, Anthony Flannery, Alexander Castro
Life of this patent
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Abstract
A dual-axis sensor for measuring X and Y components of angular velocity in an X-Y sensor plane is provided. The dual-axis sensor includes a first subsensor for measuring the X component of angular velocity, and a second subsensor for measuring the Y component of angular velocity. The first subsensor and the second subsensor are contained within a single hermetic seal within the dual-axis sensor.
Claims27
A dual-axis sensor for measuring X and Y components of angular velocity in an X-Y sensor plane, the dual-axis sensor comprising:
- a first subsensor for measuring the X component of angular velocity;
- and
- a second subsensor for measuring the Y component of angular velocity,
- wherein the first subsensor for measuring the X component of angular velocity and the second subsensor for measuring the Y component of angular velocity are contained within a single hermetic seal within the dual-axis sensor.
1 more element
Dependencies are inferred from the claim text.