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US 2006/0218312 A1Published application
Input signal analyzing system and control apparatus using same
AssigneeASM Japan K.K.
InventorsMasahiro Takizawa, Kazuyoshi Ishigaya, Kunio Ootani
Life of this patent
Estimating the term…
Abstract
For example, by providing MMF software 10, 11 transferring data using a memory-mapped file respectively in a semiconductor manufacturing apparatus 1 and in an input signal analyzing system 8, data transfer load placed on control software 4 and analyzing software 9 is reduced. Additionally, in the MMF software 10, by inserting counter information in the memory-mapped file and by observing the information by the MMF software 11, communication abnormality is detected.
Claims22
A signal analyzing system comprising:
- a control unit configured to receive input signal data and provides an output to a control apparatus;
- a control signal data blocking unit configured to block information in a data analyzing area of the input signal data and transfers the blocked information as a control signal data block;
- an analytic signal data blocking unit configured to create an analytic signal data block for signal analysis use based on the control signal data block transferred;
- and
- a signal analyzing unit configured to analyze the input signal data based on the analytic signal data block.
2 more elements
A signal analyzing method comprising the steps of:
- receiving input signal data for a control apparatus;
- creating and transferring a control signal data block from information in a data analyzing area of said input signal data;
- creating an analytic signal data block for signal analysis use based on said control signal data block transferred, and
- analyzing said input signal data based on said analytic signal data block.
1 more element
Dependencies are inferred from the claim text.