Method for Etching Microchannel Networks within Liquid Crystal Polymer Substrates
AssigneeUniversity of South Florida
InventorsDavid Fries, George Steimle, Heather Broadbent
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AssigneeUniversity of South Florida
InventorsDavid Fries, George Steimle, Heather Broadbent
Estimating the term…
The present invention provides for a method for the fabrication of microchannels, and more particularly to the fabrication of microchannels for use in Microelectromechanical (MEMS) devices and MEMS related devices. In accordance with an embodiment of the present invention, microchannels are formed by a microfabrication method utilizing electronic imaging techniques in combination with chemical etching and subsequent metallization. The method of the present invention is effective in producing networks of channels in liquid crystal polymer (LCP) polymeric substrates which are highly defined in terms of their patterns, and thus are able to encompass a wide variety of end uses.
A method of forming a patterned microchannel network in a liquid crystal polymer substrate, the method comprising the steps of:
Dependencies are inferred from the claim text.