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US 2006/0216549 A1Published application
Lead zirconate titanate niobate film, lead zirconate titanate niobate laminate and method of manufacturing the same
AssigneeSeiko Epson Corporation
InventorsTakeshi Kijima, Takamitsu Higuchi
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Abstract
A lead zirconate titanate niobate laminate includes a sapphire substrate and a lead zirconate titanate niobate film formed on the sapphire substrate.
Claims20
A lead zirconate titanate niobate film epitaxially grown in a tetragonal (110) or (101) orientation or a rhombohedral (110) orientation.
A lead zirconate titanate niobate laminate comprising a sapphire substrate and a lead zirconate titanate niobate film formed on the sapphire substrate.
A method of manufacturing a lead zirconate titanate niobate laminate, the method comprising:
- providing a sapphire substrate;
- providing a precursor composition including a precursor for forming a lead zirconate titanate niobate film, the precursor including at least niobium, titanium, and zirconium and having a partial ester bond;
- and
- applying the precursor composition to the sapphire substrate and heating the precursor composition to form a lead zirconate titanate niobate film.
1 more element
Dependencies are inferred from the claim text.