Laminate and method of forming the same, insulating film, and semiconductor device

A laminate, comprising:

• a first silica-based film;
• a second silica-based film;
• and
• an organic film,
• wherein the second silica-based film includes an organic group containing a carbon-carbon double bond or a carbon-carbon triple bond;
• and
• wherein the second silica-based film is a film obtained by forming a coating by using a film-forming composition which includes a hydrolysis-condensation product obtained by hydrolysis and condensation of the following silane compound (A) and the following silane compound (B) in the presence of an acidic, basic, or metal chelate compound, and curing the resulting coating;
• (A) at least one silane compound selected from the group consisting of compounds shown by the following general formula (1), compounds shown by the following general formula (2), and compounds shown by the following general formula (3),
• RaSi(OR1)4-a (1)
• wherein R represents a hydrogen atom, a fluorine atom, or an organic group, R1 represents an organic group, and a represents an integer of 1 or 2,
• Si(OR2)4 (2)
• wherein R2 represents an organic group,
• R3b(R4O)3-bSi—(R7)d—Si(OR5)3-cR6c (3)
• wherein R3 to R6 individually represent organic groups, b and c individually represent integers from 0 to 2, R7 represents an oxygen atom, a phenylene group, or a group —(CH2)m— (wherein m represents an integer from 1 to 6), and d represents 0 or 1;
• and
• (B) at least one silane compound selected from the group consisting of compounds shown by the following general formula (4) and compounds shown by the following general formula (5),
• wherein Rx represents an organic group containing a carbon-carbon double bond or a carbon-carbon triple bond, and R81 to R83 individually represent a hydrogen atom, a halogen atom, a hydroxyl group, an alkoxyl group, or an organic group, provided that at least one of R81 to R83 represents an atom or a group other than the organic group,
• wherein Ry represents a divalent organic group containing a carbon-carbon double bond or a carbon-carbon triple bond, and R91 to R96 individually represent a hydrogen atom, a halogen atom, a hydroxyl group, an alkoxyl group, or an organic group, provided that at least one of R91 to R93 and at least one of R94 to R96 represent an atom or a group other than the organic group.