Nanoparticle structure and method of manufacturing the same
AssigneeSamsung Electronics Co., Ltd.
InventorsJoo-hyun Lee, Yoon-ho Khang, Eun-hye Lee
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Abstract
The nanoparticle structure includes: a substrate; and nanoparticles formed on the substrate, wherein the nanoparticles include silicide. The method of manufacturing the nanoparticle structure includes: forming an Si source layer to a predetermined thickness; forming nanoparticles using a predetermined metal and silicon; depositing the nanoparticles on the Si source layer; and growing the nanoparticles to form silicide. Nanoparticles having a desired size can be easily obtained by adjusting the thickness of the silicon source layer.
Claims17
A nanoparticle structure comprising:
- a substrate;
- and
- nanoparticles formed on the substrate,
- wherein the nanoparticles include silicide.
A method of manufacturing a nanoparticle structure, the method comprising:
- forming an Si source layer to a predetermined thickness;
- forming nanoparticles using a predetermined metal and silicon;
- depositing the nanoparticles on the Si source layer;
- and
- growing the nanoparticles to form silicide.
Dependencies are inferred from the claim text.