Mold and process of production thereof
AssigneeCanon Kabushiki Kaisha
InventorsTatsuya Saito, Aya Imada, Tohru Den
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Abstract
A novel mold is provided. The mold is prepared through steps of forming concavo-convex pattern on substrate, forming a film by embedding material of a composition having shape-memory in the concavo-convex pattern, and forming mold having the concavo-convex pattern by separating the film from the concavo-convex pattern after the film formation in the film formation step.
Claims19
A mold for nano-imprinting with an concavo-convex pattern comprising a surface portion, the surface portion has the concavo-convex pattern and comprises a shape-memory material.
The mold for nano-imprinting according to claim l, wherein the surface portion is prepared by a process comprised of the steps:
- forming a film of the shape-memory material on an article having an concavo-convex pattern, and
- separating the film from the article.
A process for preparing a mold-for nano-imprinting, comprising steps of:
- forming an concavo-convex pattern on a substrate,
- forming a film of a shape-memory material on the concavo-convex pattern by making an impression of the concavo-convex pattern with the shape-memory material, and
- separating the film from, the concavo-convex pattern to obtain a mold having the transferred concavo-convex pattern.
A mold having a surface portion comprising a concavo-convex pattern, which surface portion is comprised of a shape-memory material.
Dependencies are inferred from the claim text.