Optical member, manufacturing method of the optical member, waveguide substrate, and photo-electric integrated substrate
AssigneeFuji Xerox Co., Ltd.
InventorTomoki Umezawa
Life of this patent
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Abstract
A manufacturing method of an optical member for optical path conversion to be connected to an optical waveguide provided in a substrate includes forming plural inclined surfaces on a wafer by etching, forming openings corresponding to the inclined surfaces in a plate-like member, forming a combined body, in which the inclined surfaces and the openings correspond to each other, by bonding the wafer and the plate-like member, and dividing the combined body into small pieces each of which includes the inclined surface and the opening.
Claims24
A manufacturing method of an optical member for optical path conversion to be connected to an optical waveguide provided in a substrate, comprising:
- forming a plurality of inclined surfaces on a wafer by etching;
- forming openings corresponding to the inclined surfaces in a plate-like member;
- forming a combined body, in which the inclined surfaces and the openings correspond to each other, by bonding the wafer and the plate-like member;
- and
- dividing the combined body into small pieces each of which includes the inclined surface and the opening.
A manufacturing method of an optical member for optical path conversion to be connected to an optical waveguide provided in a substrate, comprising:
- forming a plurality of inclined surfaces on a wafer by etching;
- forming lenses corresponding to the inclined surfaces on a thin plate member;
- forming a combined body, in which the inclined surfaces and the lenses correspond to each other, by bonding the wafer and the thin plate member;
- and
- dividing the combined body into small pieces each of which includes the inclined surface and the lens.
A manufacturing method of an optical member for optical path conversion, comprising:
- forming a tubular optical path including an inclined surface to change an optical path in the member;
- and
- forming a lens by filling resin from one end of the tubular optical path and by curing the resin in a state where the resin overflows from the other end.
A manufacturing method of an optical member for optical path conversion, comprising:
- forming a groove including an inclined surface to convert an optical path in a first substrate;
- forming an opening corresponding to the inclined surface in a second substrate;
- applying resin to the groove of the first substrate;
- overlapping the second substrate on the first substrate to which the resin has been applied;
- and
- forming a lens by curing the resin protruding from the opening of the second substrate by the overlapping.
A manufacturing method of an optical member for optical path conversion, comprising:
- forming a groove including an inclined surface to convert an optical path in a first substrate;
- forming a hole in a thin plate member disposed on a second substrate at a position corresponding to the inclined surface;
- forming a lens by curing resin applied correspondingly to the hole of the thin plate member;
- forming an opening in the second substrate at a position corresponding to the lens;
- and
- overlapping the first substrate on the second substrate to cause the inclined surface to correspond to the opening.
A manufacturing method of an optical member for optical path conversion, comprising:
- forming a groove including an inclined surface to convert an optical path in a substrate;
- forming a hole in a thin plate member at a position corresponding to the inclined surface;
- forming a lens by curing resin applied correspondingly to the hole of the thin plate member;
- and
- overlapping the substrate on the thin plate member to cause the inclined surface to correspond to a position of the lens.
An optical member comprising:
- a tubular optical path comprising:
- a first member including a groove and an inclined surface at an end of the groove;
- and
- a second member including an opening,
- wherein the tubular optical path in which an optical path is converted by the inclined surface is formed by bonding the first member and the second member to cause the inclined surface to correspond to the opening.
An optical member comprising:
- an optical path comprising:
- a first member including a groove along with a horizontal direction;
- a second member including an opening along with a vertical direction;
- and
- a surface formed at one of the end of the groove and the end of the opening, the surface being inclined to both horizontal and vertical directions,
- wherein the optical path is formed by bonding the first member and the second member.
A waveguide substrate comprising:
- an optical member comprising:
- a first member including a groove and an inclined surface at an end of the groove;
- and
- a second member including an opening,
- wherein a tubular optical path in which an optical path is converted by the inclined surface is formed by bonding the first member and the second member to cause the inclined surface to correspond to the opening;
- and
- an optical waveguide optically connected to one end of the tubular optical path of the optical member.
A photo-electric integrated substrate comprising:
- an optical module on which an optical element optically connected to the other end of the optical path of the optical member included in an waveguide substrate is mounted,
- the waveguide substrate comprising:
- an optical member comprising:
- a first member including a groove and an inclined surface at an end of the groove;
- and
- a second member including an opening,
- wherein a tubular optical path in which an optical path is converted by the inclined surface is formed by bonding the first member and the second member to cause the inclined surface to correspond to the opening;
- and
- an optical waveguide optically connected to one end of the tubular optical path of the optical member.
Dependencies are inferred from the claim text.