Image correction method
AssigneeAdvanced Mask Inspection Technology Inc.
InventorsJunji Oaki, Shinji Sugihara, Yuichi Nakatani
Life of this patent
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Abstract
An image correction method having a small number of setting parameters achieved by integrating shift (alignment) in unit of a sub-pixel and image correction. A relationship between an inspection reference pattern image and a pattern image under test is identified, a mathematical expression model which fits a pixel error, expansion and contraction/distortion noise, and sensing noise of the image is constructed, and the model is simulated to generate an estimation model image.
Claims7
An image correction method for generating an estimation model image from an inspection reference pattern image and a pattern image under test, said method comprising:
- setting reference points at a plurality of separated positions of the inspection reference pattern image, giving weights to the inspection reference pattern image with reference to the reference points, and generating decomposed images the number of which is equal to the number of reference points;
- generating simultaneous equations which describe an input-output relationship using a linear prediction model using, as an output, respective pixels of the pattern image under test and using, as an input, a linear coupling of a pixel group around pixel corresponding to each pixel of the decomposed images the number of which is equal to the number of reference points;
- solving the simultaneous equations to estimate parameters of the prediction model;
- and
- generating an estimation model image by using the estimated parameters.
Dependencies are inferred from the claim text.