Process flow thermocouple
AssigneeTokyo Electron Limited
InventorChristopher Wuester
Life of this patent
Estimating the term…
Abstract
A sensor assembly for accurately measuring the temperature of a process fluid flowing within process tubing is disclosed. A thermocouple sensor can be configured within a protective sheath with leads protruding from the sheath. A gland-like structure can be coupled to the sheath or machined integral to the sheath. The sensor assembly can be coupled to a closed loop. The sensor can be positioned within or in close proximity to the fluid flowing in the closed loop, and the sensor accurately measures the temperature of the process fluid flowing in the closed loop. The sensor assembly is easily assembled and/or disassembled allowing the sensor to be maintained.
Claims35
A system for monitoring a processing fluid temperature within a high-pressure processing system, the system comprising:
- a recirculation loop comprising a high pressure processing chamber and a high pressure recirculation system coupled to the high pressure processing chamber, wherein the processing fluid flows through the recirculation loop;
- a high-pressure fluid supply system coupled to the recirculation loop and comprising means for supplying fluid to the recirculation loop;
- a process chemistry supply system coupled to the recirculation loop and comprising means for supplying process chemistry to the recirculation loop;
- a sensor assembly coupled to the recirculation loop for monitoring the temperature of the processing fluid flowing through the recirculation loop;
- and
- a controller coupled to the high pressure processing chamber, the recirculation system, the high-pressure fluid supply system, the process chemistry supply system, and the sensor assembly wherein the controller comprises means for obtaining temperature data for the processing fluid during a from the sensor assembly, means for comparing the temperature data to a threshold value, means for creating a fault condition when the temperature data is substantially greater than or substantially less than the threshold value, and means for creating a non-fault condition when the temperature data is approximately equal to the threshold value.
A sensor assembly comprising:
- a sensor subassembly including a sensor, a body coupled to the sensor, an electrical connection means coupled to the body, and a protective sheath, wherein the sensor and the body are coupled internally to the protective sheath and the sensor is mounted within a tip portion of the protective sheath;
- a flow assembly comprising a T-shaped element including a first section having a sealing feature, a holding surface, and a mating feature configured to receive a portion of the sensor subassembly and a second section including means for coupling the sensor assembly into the recirculation loop;
- and
- a gland assembly including a sealing gland having a mating surface, a gasket removably coupled to the sealing gland and the sealing feature of the T-shaped element, and a nut removably coupled to the mating surface of the sealing gland and the holding surface of the T-shaped element.
A sensor assembly comprising:
- a sensor subassembly including a sensor, a body coupled to the sensor, an electrical connection means coupled to the body, and a protective sheath, wherein the sensor and the body are coupled internally to the protective sheath and the sensor is mounted within a tip portion of the protective sheath;
- a flow assembly comprising a T-shaped element including a first section having a sealing feature, a holding surface, and a mating feature configured to receive a portion of the sensor subassembly and a second section including means for coupling the sensor assembly into the recirculation loop;
- and
- a gland assembly including a sealing gland having a mating surface, a gasket removably coupled to the sealing gland and the sealing feature of the T-shaped element, and a nut removably coupled to the mating surface of the sealing gland and the holding surface of the T-shaped element.
A method for monitoring a high-pressure processing fluid flowing through a recirculation loop in a high-pressure processing system, the method comprising:
- obtaining temperature data for the high-pressure processing fluid, the sensor assembly including fluid passageway through which the high-pressure processing fluid flows and a temperature sensor configured within a fluid passageway;
- comparing the temperature data to a threshold and
- declaring a fault when the temperature data is not approximately equal to the threshold.
A computer readable medium containing program instructions for execution on a controller coupled to a high-pressure processing system, which when executed by the controller, cause the high-pressure processing system to perform the steps of:
- positioning a substrate within a processing chamber, the high-pressure processing system comprising a recirculation loop coupled to the processing chamber;
- circulating a high-pressure processing fluid through the recirculation loop, the recirculation loop including a sensor assembly coupled to the high-pressure processing fluid;
- obtaining temperature data for the high-pressure processing fluid, the sensor assembly including fluid passageway through which the high-pressure processing fluid flows and a temperature sensor configured within a fluid passageway;
- comparing the temperature data to a threshold and
- declaring a fault when the temperature data is not approximately equal to the threshold.
Dependencies are inferred from the claim text.