Laser irradiation method and laser irradiation device and method of manufacturing semiconductor device
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsKoichiro Tanaka, Hidekazu Miyairi, Aiko Shiga, Akihisa Shimomura, Atsuo Isobe
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Abstract
The present invention is characterized in that by laser beam being slantly incident to the convex lens, an aberration such as astigmatism or the like is occurred, and the shape of the laser beam is made linear on the irradiation surface or in its neighborhood. Since the present invention has a very simple configuration, the optical adjustment is easier, and the device becomes compact in size. Furthermore, since the beam is slantly incident with respect to the irradiated body, the return beam can be prevented.
Claims50
A laser irradiation device comprising:
- a laser;
- and
- a convex lens,
- wherein said convex lens is slantly set with respect to a laser beam emitted from said laser.
A laser irradiation device comprising:
- a laser;
- and
- a convex lens,
- wherein said convex lens is slantly set with respect to a laser beam emitted from said laser, and an irradiated surface is set so that a laser beam traveled via said convex lens is slantly incident with respect to said irradiation surface.
A laser irradiation device comprising:
- a laser;
- and
- a convex lens,
- wherein said convex lens is slantly set with respect to a laser beam emitted from said laser, an irradiated surface is set so that a laser beam traveled via said convex lens is slantly incident with respect to said irradiation surface, and a shape of said laser beam is deformed through said convex lens so that said shape of said laser beam is in a linear shape on an irradiated surface.
A laser irradiation device comprising:
- a laser;
- and
- a convex lens,
- wherein said convex lens is slantly set with respect to a laser beam emitted from said laser, an irradiated surface is set so that a laser beam traveled via said convex lens is slantly incident with respect to said irradiation surface, and a shape of said laser beam is deformed through said convex lens so that said shape of said laser beam is in a linear shape on an irradiated surface,
- wherein a beam length w of said laser beam incident into an irradiated body set over a substrate, and thickness d of said substrate, and an incident angle 0 of said laser beam at which angle said laser beam is incident with respect to said irradiated body satisfy the following expression:
- θ≧arctan (w/(2×d))
A laser irradiation method comprising:
- emitting a laser beam from a laser,
- making said laser beam slantly incident with respect to a convex lens slantly set with respect to said laser beam,
- deforming a shape of said laser beam through said convex lens so that said shape of said laser beam is in a linear shape on an irradiated body, and
- irradiating said linear laser beam to said irradiated body while said linear laser beam and said irradiated body are relatively moved.
A laser irradiation method comprising:
- emitting a laser beam from a laser,
- making said laser beam slantly incident with respect to said convex lens slantly set with respect to said laser beam,
- setting an irradiated surface so that a laser beam traveled via said convex lens is slantly incident with respect to said irradiated surface,
- deforming a shape of said laser beam through said convex lens so that said shape of said laser beam is in a linear shape on said irradiated surface, and
- irradiating said laser beam in said linear shape to said irradiated surface while said laser beam in said linear shape and said irradiated surface are relatively moved.
A laser irradiation method comprising:
- emitting a laser beam from said laser,
- making said laser beam slantly incident with respect to said convex lens slantly set with respect to said laser beam,
- deforming a shape of said laser beam thorugh said convex lens so that said shape of said laser beam is in a linear shape on an irradiated surface,
- irradiating said laser beam in said linear shape to said irradiated surface while said laser beam in said linear shape and said irradiated surface are relatively moved,
- wherein a beam length w of said laser beam incident into said irradiated surface set over a substrate, and thickness d of said substrate, and an incident angle θ of said laser beam at which angle said laser beam is incident with respect to said irradiated surface satisfy the following expression:
- θ≧arctan (w/(2×d))
Dependencies are inferred from the claim text.