Visible light-reflecting member
AssigneeTadahiro Ohmi
InventorsTadahiro Ohmi, Akihiro Morimoto, Naoki Tanahashi
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Abstract
A visible light-reflecting member is disclosed which uses a plate or a film for reflecting visible lights, whose reflective surface is provided with an aluminum thin film having an aluminum purity of not less than 99 mass % and an X-ray diffraction pattern wherein, among peak intensities ascribed to aluminum, the peak intensity ascribed to the (111) plane is higher than the total of the other peak intensities.
Claims19
A visible light reflecting member using a plate or a film for visible light reflection, said plate or film having a reflective surface provided with an aluminum thin film in which a purity of aluminum is 99 mass % or more and, among peaks attributed to the aluminum in X-ray diffraction, the peak intensity attributed to (111) planes being higher than the total of the other peak intensities attributed to the aluminum.
A visible light reflecting member having substantially flat or curved surface portions with a surface roughness (Ra) of 40 nm or less on a reflective surface thereof and using an aluminum thin film for visible light reflection.
A method of manufacturing visible light reflecting member comprising the steps of applying a potential of −60V to −5V to a substrate in the form of a plate or a film to be formed thereon with an aluminum thin film and irradiating ions with a low energy of 80 eV to 15 eV, thereby forming the aluminum thin film by a sputtering method.
A method of manufacturing an aluminum thin film visible light reflecting member comprising the steps of:
- forming an aluminum thin film on a substrate in the form of a plate or a film;
- and
- oxidizing said aluminum thin film by the use of oxygen radicals produced by a plasma in a noble gas containing a small amount of oxygen, thereby forming an oxide film on a surface of said aluminum thin film.
Dependencies are inferred from the claim text.