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US 2006/0215380 A1Published application
Embedded capacitor structure
AssigneeAgency for Science, Technology and Research
InventorsChee Lu, Boon Lok, Kai Chua, Lai Wai
Life of this patent
Estimating the term…
Abstract
An embedded capacitor structure comprising a main body; at least one embedded capacitor, having a first electrode, a dielectric layer, and a second electrode, formed in the main body; and at least one via electrical connection formed in the main body; wherein at least one of the first and second electrodes is free from direct electrical connection to the via electrical connections.
Claims12
An embedded capacitor structure comprising
- a main body;
- at least one embedded capacitor, having a first electrode, a dielectric layer, and a second electrode, formed in the main body;
- and
- at least one via electrical connection formed in the main body;
- wherein at least one of the first and second electrodes is free from direct electrical connection to the via electrical connections.
2 more elements
A method of manufacturing an embedded capacitors structure, the method comprising:
- forming at least one embedded capacitor in a main body for the embedded capacitor structure, the embedded capacitor having a first electrode, a dielectric layer, and a second electrode;
- and
- forming at least one via electrical connection in the main body;
- wherein at least one of the first and second electrode is free from direct electrical connection to the via electrical connections.
1 more element
Dependencies are inferred from the claim text.