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US 2006/0215264 A1Published application
Apparatus for the detection of photons of a light beam
AssigneeLeica Microsystems CMS GmbH
InventorsHolger Birk, Rafael Storz, Volker Seyfried
Life of this patent
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Abstract
An apparatus for detecting photons of a light beam emanating from a spatially limited source includes a detection device having a plurality of detectors forming a three-dimensional array with semitranslucent EMCCDs disposed one behind another. A light splitting device is disposed in a path of rays of the light beam for splitting the light beam so as to distribute the photons over the detectors for detection.
Claims19
1-15. (canceled)
An apparatus for detecting photons of a light beam emanating from a spatially limited source, the apparatus comprising:
- a detection device including a plurality of detectors forming a three-dimensional array including a first semitranslucent EMCCD disposed behind a second semitranslucent EMCCD;
- and
- a light splitting device disposed in a path of rays of the light beam and configured to split the light beam so as to distribute the photons over the detectors for detection.
Dependencies are inferred from the claim text.