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US 2006/0215175 A1Published application
Surface and subsurface detection sensor
AssigneeLer Technologies, Inc.
InventorAraz Yacoubian
Life of this patent
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Abstract
A sensor comprises an optical modulator that generates a modulation signal, an interferometer that mixes an acoustic signal evoked by a pulsed laser with the modulation signal to down-convert the acoustic signal to lower frequencies, and a photodetector that detects the down-converted signal.
Claims66
A sensor comprising:
- an optical modulator that generates a modulation signal;
- an interferometer that mixes the modulation signal with an acoustic signal evoked by a pulsed laser to down-convert the acoustic signal to lower frequencies;
- and
- a multiple-dimensional photodetector that detects the down-converted signal.
1 more element
The sensor according to claim 44 further comprising:
- the sensor mounted to the process chamber whereby the sensor is configured to detect phenomena selected from a group consisting of defects and integrity of subsurface structures, line edge roughness, line slope, real-time phenomena in multiple processing steps while maintaining a sample in position in the process chamber.
A method of acquiring subsurface structural information comprising:
- illuminating a sample under test with a pulsed laser signal that propagates a shock wave through the sample;
- and
- measuring a surface vibration signature of a micro or nano structure of the sample induced by the pulsed laser signal;
- and
- analyzing an acoustic spectrum to determine sample critical dimensions.
2 more elements
A sensor comprising:
- an optical modulator that generates a modulation signal;
- an interferometer that mixes the modulation signal with an acoustic signal evoked by a pulsed laser to down-convert the acoustic signal to lower frequencies;
- a photodetector that detects the down-converted signal;
- and
- processing electronics coupled to the photodetector and configured to perform phase sensitive measurement of elastic waves.
2 more elements
A sensor comprising:
- an optical modulator that generates a modulation signal;
- an interferometer that mixes the modulation signal with an acoustic signal evoked by a pump laser beam to down-convert the acoustic signal to lower frequencies;
- a photodetector that detects the down-converted signal;
- and
- a direct modulated light coupled to the interferometer and operative as an acoustic excitation source.
2 more elements
A sensor comprising:
- an optical modulator that generates a modulation signal;
- a plurality of interferometers that mix the modulation signal with an acoustic signal evoked by a pulsed laser to down-convert the acoustic signal to lower frequencies, the interferometer plurality configured to generate frequency modulation higher than attained for a singular modulator;
- and
- a photodetector that detects the down-converted signal.
1 more element
Dependencies are inferred from the claim text.