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US 2006/0215173 A1Published application
Multi-axis interferometer with procedure and data processing for mirror mapping
AssigneeZygo Corporation
InventorsHenry Hill, Gary Womack
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Abstract
In general, in one aspect, the invention features methods that include locating a plurality of alignment marks on a moveable stage, interferometrically measuring a position of a measurement object along an interferometer axis for each of the alignment mark locations, and using the interferometric position measurements to derive information about a surface figure of the measurement object. The position of the measurement object is measured using an interferometry assembly and either the measurement object or the interferometry assembly are attached to the stage.
Claims35
A method, comprising:
- locating a plurality of alignment marks on a moveable stage;
- interferometrically measuring a position of a measurement object along an interferometer axis for each of the alignment mark locations;
- and
- using the interferometric position measurements to derive information about a surface figure of the measurement object,
- wherein the position of the measurement object is measured using an interferometry assembly and either the measurement object or the interferometry assembly are attached to the stage.
2 more elements
A system, comprising:
- a moveable stage;
- an alignment sensor configured to locate alignment marks associated with the moveable stage;
- a interferometer assembly configured to produce three output beams each including interferometric information about a distance between the interferometer and a measurement object along a respective axis, the interferometer assembly or the measurement object being attached to the moveable stage;
- and
- an electronic processor configured to derive information about a surface figure of the measurement object based on data acquired by locating the plurality of alignment marks with the alignment sensor and measuring the position of the measurement object along one of the respective axes of the interferometer assembly for each of the alignment mark locations.
2 more elements
Dependencies are inferred from the claim text.