Image shift optic for optical system
AssigneeNikon Corporation
InventorAndrew Hazelton
Life of this patent
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Abstract
An apparatus for adjusting image formation includes a first stage, a second stage, an optical element, a counterweight, and an actuator. The first stage is operable to project an original image. A final image corresponding to the original image is formed on the second stage. The optical element is movable with at least one degree of freedom operable to shift a position of the final image. The counterweight is movable with the at least one degree of freedom. The actuator is operable to actuate the optical element and the counterweight in opposite directions.
Claims37
An apparatus for adjusting image formation, comprising:
- a first stage operable to project an original image;
- a second stage on which a final image corresponding to the original image is formed;
- an optical element movable with at least one degree of freedom operable to shift a position of the final image,
- a counterweight movable with the at least one degree of freedom;
- and
- an actuator operable to actuate the optical element and the counterweight in opposite directions.
An apparatus for adjusting image formation, comprising:
- a first stage operable to project an original image;
- a second stage on which a final image corresponding to the original image is formed;
- an optical element operable to shift a position of the final image;
- a controller operable to receive
- a first input corresponding to a desired final image position, and
- a second input corresponding to an actual final image position;
- and based on the desired final image position and the actual final image position, to output
- a first output for actuating the optical element;
- and
- an actuator operable to actuate the optical element based on the first output.
A method for adjusting image formation, comprising:
- projecting an original image from a first stage;
- forming a final image corresponding to the original image on a second stage;
- actuating an optical element;
- and
- actuating a counterweight in opposite directions to shift a position of the final image.
An method for adjusting image formation, comprising:
- projecting an original image from a first stage;
- forming a final image corresponding to the original image on a second stage;
- receiving a first input corresponding to a desired final image position at a controller;
- receiving a second input corresponding to an actual final image position at the controller;
- and
- outputting a first output from the controller to an actuator for actuating an optical element which shifts the position of the final image based on the desired final image position and the actual final image position.
A lithographic exposure device for projecting an image of pattern on a reticle onto a wafer as a final image, comprising:
- an illumination system for providing beam to the reticle;
- a first stage for holding and moving the reticle;
- an optical projection system for projecting the image onto the wafer;
- a second stage for holding and moving the wafer synchronously with the first stage;
- an optical element for shifting a position of the final image;
- an actuator for actuating the optical element;
- a controller for controlling the actuation of the first and second stages and the actuator.
Dependencies are inferred from the claim text.