Piezoelectric vibration piece and piezoelectric device
AssigneeSeiko Epson Corporation
InventorYoshiyuki Yamada
Life of this patent
Estimating the term…
Abstract
A piezoelectric vibration piece includes a base made of a piezoelectric material; a plurality of vibration arms which is integrally formed with the base and extends in parallel; elongate grooves which are formed along longitudinal directions of the vibration arms; and excitation electrodes which include inner electrodes disposed in the elongate grooves and side electrodes disposed in side surfaces facing the inner electrodes, wherein widening portions in which the widths of the vibration arms are widened toward the base at a joint between the vibration arms of the base are formed, and the side electrodes are led to principal surfaces and side surfaces of the widening portions.
Claims3
A piezoelectric vibration piece comprising:
- a base made of a piezoelectric material;
- a plurality of vibration arms which is integrally formed with the base and extends in parallel;
- elongate grooves which are formed along longitudinal directions of the vibration arms;
- and
- excitation electrodes which include inner electrodes disposed in the elongate grooves and side electrodes disposed in side surfaces facing the inner electrodes,
- wherein widening portions in which the widths of the vibration arms are widened toward the base at a joint between the vibration arms of the base are formed, and the side electrodes are led to principal surfaces and side surfaces of the widening portions.
A piezoelectric device which receives a piezoelectric vibration piece in a package or a case, the piezoelectric vibration piece comprises:
- a base made of a piezoelectric material;
- a plurality of vibration arms which is integrally formed with the base and extends in parallel;
- elongate grooves which are formed along longitudinal directions of the vibration arms;
- and
- excitation electrodes which include inner electrodes disposed in the elongate grooves and side electrodes disposed in side surfaces facing the inner electrodes,
- wherein widening portions in which the widths of the vibration arms are widened toward the base at a joint between the vibration arms of the base are formed, and side electrodes are led to principal surfaces and side surfaces of the widening portions.
Dependencies are inferred from the claim text.