Mechanical resonator
AssigneePanasonic Corporation
InventorKunihiko Nakamura
Life of this patent
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Abstract
A mechanical resonator is constructed such that it has a vibration body that performs a mechanical resonant vibration and also has an electrode located in the vicinity of the vibration body and such that it is shaped into the surface shape of the electrode when deformed during a resonance mode of the vibration body, whereby the electrostatic capacitance change per unit vibration displacement amount can be enlarged. In this way, a mechanical resonator can be realized which performs an effective electricity-to-machine or machine-to-electricity conversion. Moreover, this mechanical resonator can be used to realize a small-sized, high-performance filter circuit or switch circuit in a high-density integrated electrical circuit.
Claims25
A mechanical resonator comprising:
- a vibration body operable to perform a mechanical resonant vibration;
- and
- an electrode located in a vicinity of the vibration body, a surface of the electrode adjacent to the vibration body having a curved shaped in a direction of an amplitude of the resonant vibration of the vibration body.
A mechanical resonator comprising:
- a vibration body operable to perform mechanical resonant vibration;
- and
- an electrode located in a vicinity of the vibration body and operable to vibrated in a resonance mode at a same resonant frequency as the vibration body.
A mechanical resonator comprising:
- a vibration body operable to perform a mechanical resonant vibration, the vibration body having a beam shape with fixed ends;
- and
- an electrode disposed in close proximity to the vibration body, a surface of the electrode located adjacent to the vibration body having a concave shape with respect to the vibration body.
A mechanical resonator comprising:
- a vibration body operable to perform a mechanical resonant vibration, the vibration body having a cantilever shape with one fixed end;
- and
- an electrode disposed in close proximity to the vibration body, a surface of the electrode located adjacent to the vibration body having a shape resembling, a shape of the vibration body during a resonance mode.
Dependencies are inferred from the claim text.